Water Cooled Gate Valves
» Available with Cooled Gates, Bodies and Flanges » For use in high Temperature Environments » Example: Loadlock isolation on Si Crystal Growing Furnace Operates at 900 0C. » Unique products such as Sight Port Isolation Gate Valves are also available. These Isolates and protects site ports on furnace
...morevacuum valves
GNB has an over 40 year proven track record of manufacturing high quality, custom engineered vacuum solutions for the scientific, industrial, and research vacuum industry. As America’s leading manufacturer of large vacuum valves, we also deliver a diverse range of high vacuum, and high temperature, products and services.
...morevacuum technology
MKS is the leader in pressure and vacuum measurement. The MKS family of pressure and vacuum measurement instruments includes Vacuum & Pressure Gauges, Vacuum & Pressure Transducers, and Vacuum & Pressure Gauge Controllers.
...morevacuum machine
MKS is the leader in pressure and vacuum measurement. The MKS family of pressure and vacuum measurement instruments includes Baratron® Capacitance Manometers, Pressure Sensors, Pressure Switches and Pressure Control Subsystems. The MKS family of solutions for control of vacuum and pressure include downstream valves and controllers, upstream valves and controllers, vacuum isolation valves and integrated solutions. Our broad offering includes high speed butterfly control valve, high speed pendulum valves, SST isolation valves, as well as closed-loop pressure controllers with advanced model based control.
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For almost 40 years we have manufactured hydrocarbon vacuum pump fluids of all grades and viscosities. Our semi-synthetic hydrocarbon vacuum pump oil offers superior chemical stability. KJLC’s new line of semi-synthetic mechanical pump oils offers superior performance. KJLSS oil contains an anti-oxidation additive which extends the useful life of the oil. With its low vapor pressure this oil is an ideal choice for a variety of applications. KJLSS is a semi-synthetic oil with a high viscosity index, which makes it much more energy efficient than many other vacuum pump oils. It has the added benefit of being able to withstand higher operating temperatures. This new oil is available in four different types, with varying viscosities. » Mechanical Vacuum Pump Oil » Diffusion Vacuum Pump Oil » Vacuum Grease » Vacuum Sealants and Solvents
...moreVacuum Flanges & Components
We manufacture a comprehensive range of flanges and flanged components such as nipples, elbows, tees, crosses, flex bellows, glass-metal seals, quick couplings, viewports, etc. in all standard vacuum flange systems. » CF Flanges & Components » KF Flanges & Components » ISO Flanges & Components » ASA Flanges & Components » Wire-Seal Flanges & Hardware » Adapters and Couplings » Bellows, Tubing & Weld Fittings » Viewports and Shutters » Cajon & Swagelok Fittings » Gaskets, O-rings and Vented Hardware
...moreVacuum Chambers
The kurt j. Lesker company⮠is a leading manufacturer of high and ultra-high (hv & uhv) vacuum chambers. We are recognized worldwide for specializing in both r&d and production environments. From smaller, spherical chambers several inches in diameter for r&d, to large box chambers over 14� long for production coatings, our expansive machine shop at our pittsburgh, pennsylvania facility is poised to service any and all of your custom vacuum chamber needs ⻠glass & metal bell jars ⻠cylindrical chambers ⻠spherical chambers ⻠box chambers
...moreOil Filtration units
: Protecting the vacuum chamber from vapors produced by the pumps; protecting the pumps from gases and particulates originating in the chamber; and protecting people and the atmosphere from materials from both pumps and chamber, is the job of a trap, filters, or abatement system. We offer a full range of components including: Foreline traps; System traps; Mist eliminators, Oil Filtration units, and complete Exhaust Gas Abatement systems.
...moreThin-Film Vacuum Deposition Systems
We manufactured our first thin-film vacuum deposition system over 20 years ago at our u.s. Headquarters in pittsburgh, pa. Hundreds of systems later our proven process equipment division, with engineering, manufacturing, and clean-room assembly areas in the u.s. And u.k., design and manufacture pvd and cvd deposition systems to suit your process application needs. And we now offer three different computer-controlled atomic layer deposition (ald) system platforms to support varying levels of r&d; from compact, stand-alone ald systems, to fully-integrated multi-technique deposition cluster tools � we have the right platform to support your level of research. We can develop simple single-chamber bell jar systems for smaller r & d applications to complex multi-chamber computer-controlled cluster tool systems for oledpled production, and everything in-between. Our systems can include a variety of deposition techniques, including magnetron sputtering (rf, dc, and pulsed dc) sources in both linear and circular configurations, ion sources for substrate cleaning and assisted deposition, electron beam evaporation, thermal evaporation for metals and organics, and pulsed laser ablation.
...moreSUBSTRATE HEATERS
» Sample Blocks may be drilled and tapped for sample holding clip. Note this is per customer specification at an additional charge › Sample Blocks are made of Haynes Metal and MUST be pre baked at atmosphere by the customer at or exceeding the desired operating temperature prior to use. › Haynes metal heater blocks are compatible with the Silver Thermal Paste, which is sold as an accessory by MeiVac » Wafer Blocks are Inconel metal and are wafer size specific. Wafer pockets are machined into the surface of the heater blocks › Inconel is NOT compatible with Silver Thermal Paste.
...moreRectangular Valves
GNB slitrectangular valves are fabricated from stainless steel or mild steel. Options include: » Actuation: Pneumatic, Electric, Hydraulic, Manual » Shaft Seal: Dual O-rings, Bellows » Water Cooling: Flanges, Body, Gate » Ports: Roughing, Gauge, View GNB manufactures Rectangular Gate Valves such as Slit, Flapper, Flangeless and Bodiless gate valves. Below is an example of 3” x 24” Valves for Solar panel coating system and another 26” x 52” Custom Valve for Laser isotope separation research system.
...moreDeposition Stages
» Manual or motorized manipulation The EpiCentre range of deposition stages employ cutting edge design and engineering to give high temperature wafer heating and manipulation under clean, true UHV conditions. EpiCentres have been designed for applications such as wafer annealing, degassing, modification, and for use with deposition techniques such as MBE (Molecular Beam Epitaxy), sputtering, and CVD (Chemical Vapour Deposition). EpiCentres can be mounted in any orientation to suit customer chamber designs, and application configurations. There are also versions configured for higher pressure and corrosive environments, where uniquely, the heating element is contained in a separate quartz vacuum enclosure, and is therefore completely immune from the effects of oxidizing, reactive or corrosive atmospheres. The range comprises three models EpiCentre 100, Epi Pro and EpiCentre 282.
...moreRotary Drives
The MagiDrive range of rotary feedthroughs enables rotation to be transferred into a vacuum system, using a stiff high flux magnetic coupling. The MagiDrive range is supplied with CF UHV flanges as standard and is available in twelve sizes to match the flange and torque requirements of each application. The series includes unique hollow options, permitting services to be passed through the centre and also allows MagiDrives to be ‘stacked’ one atop another providing up to four axes of independent rotation. A number of actuation methods are available from manually driven units, to pneumatic and motorized drives. MagiDrives are compact, bakeable to 250ºC and offer true UHV performance.
...moreRF & DC Power
MKS is a leading manufacturer of high reliability, compact, solid state, mid to extended (VHF) frequency RF power generators, impedance matching networks and plasma metrology, RF amplifiers for MRI equipment, and pulsed and continuous DC power generators in power levels up to 60 kW.
...moreResidual Gas Analysis
Mks mass spectrometry gas analyzer products are innovative in-situ process monitoring instruments that are fully integrated, application-specific packages, including component residual gas analyzers (rgas), web-enabled rga�s, analytical equipment, and process rgas and control software. ⻠vacuum monitoring and e-diagnostics ⻠ultra high vacuum (uhv) ⻠cvd processes ⻠vacuum baseline rga ⻠ion implant ⻠photoresist detection ⻠high-pressure rga ⻠pvd ⻠etch ⻠diffusion ⻠transfer chamber monitoring ⻠leak detection ⻠atmospheric pressure gas analysis radiation resistant residual gas analyzer: mks offers residual gas analyzers with special extenders that allow the analyzer to be operated in harsh environments like high temperatureionizing radiation with the electronics located in a safeshielded position.
...morePush Pull Devices
The Magnetic Push Pull range provides linear and linear plus rotary motion solutions with up to 250mm (10″) stroke. This compact range is specifically designed for low load applications, such as specimen transfer, thermocouple ‘contacting’ or manual shutters, for high or ultra-high vacuum applications. The range consists of three series – Rotary & Linear, Linear Only (Guided) , Linear Unguided with varying actuation options such as manual, pneumatic and stepper or DC motorized.
...morepressure measurement
MKS is the leader in pressure and vacuum measurement. The MKS family of pressure and vacuum measurement instruments includes Baratron® Capacitance Manometers, Pressure Sensors, Pressure Switches and Pressure Control Subsystems. The MKS family of solutions for control of vacuum and pressure include downstream valves and controllers, upstream valves and controllers, vacuum isolation valves and integrated solutions. Our broad offering includes high speed butterfly control valve, high speed pendulum valves, SST isolation valves, as well as closed-loop pressure controllers with advanced model based control. MKS is the established leader in downstream pressure control subsystems which integrate exhaust throttle valves, advanced digital controllers and Baratron® process manometers. Our total solutions provide higher throughput with faster set points, reduced overshootundershoot, and increased uptime.
...morePower probe Range
Power probe Range is a Professional Transfer Tool range, providing linear or combined linear and rotary motion within ultra-high vacuum. These unique probes avoid the limitations of conventional designs, offering up to order of magnitude improvements in key aspects of performance. The Professional Transfer Tools are fully bakeable to 250°C and do not require dismantling. The probes are suitable for use between atmospheric pressure and ultra-high vacuum.
...moremicrowave plasma sources
Mks designs and manufactures rf torroidal and microwave plasma sources to energize and dissociate gases. Fluorine based gases such as nf3 are used to clean unwanted deposits from the walls of vacuum process chambers. Plasma sources for process chemistries include oxygen, nitrogen, and hydrogen. Mks offers a complete spectrum of ultra clean, highly reliable ozone generation, delivery and accessory products. The ozone product family includes compact, high concentration ozone generators, closed-loop controlled ozone gas delivery subsystems, state-of-the-art, high concentration dissolved ozone liquid delivery subsystems and ozone accessories for flow mixing and ozone destruction.
...moreMultiCentre high precision instruments
The MultiCentre range of high precision instruments is the latest advance in multi-axis stages, designed to meet the ever increasing demands of today’s surface analytical and synchrotron end-station applications. Modular in design, the range consists of the XL-T Series single bellows, compact stages and the high precision, dual bellows XL-R series. Each offers a full range of functions including resistive or e-Beam heating, sample biasingcurrent measurement and LN2 cooling, which can then be fitted with LHe cooling (CryoCentre series).
...moreMAGNETRON CONFIGURATION
MeiVac offers a number of options to assist in achieving desired results. The standard model MAK source is mounted on a 12″(300mm) long support with a position clamp included. Water and power are contained at atmospheric pressure within this support. A 0.75″19mm Quick Coupler vacuum feedthrough is required to integrate the source in the vacuum system and position it at the correct source to substrate distances.
...moreLinear Shift Mechanisms
Linear Shift Mechanisms (linear translators) provide linear motion along the port axis (Z). Typical applications include the positioning of Beamline filters, adjustment of sputter sources and deposition stages through to production style applications. Bakeable to 250°C, the range is supplied on CF flanges and provides true UHV performance. The Linear Shift Mechanism range is possibly the largest of its type on the market with over 500 variations. To simplify selection, the range is divided into five standard series to suit the majority of applications and includes strokes of up to 1 metre.
...moreHigh Vacuum Furnaces
As a leading global provider of high-quality vacuum products and systems, along with an established tradition of service and attention to detail, the Kurt J. Lesker Company® (KJLC®) has built a reputation for being “All Things Vacuum.” The common attribute across the entire company is the relentless and tireless pursuit of quality and customer satisfaction, both in the vacuum products and the services we provide worldwide. KJLC® takes this responsibility seriously, working at all levels to ensure high quality performance in all our products.
...moreNDIR Infrared Gas Analyzer Instruments
FTIR (Fourier Transform Infrared) and NDIR (Nondispersive Infrared) real-time and in-line gas analysis Instruments from MKS Instruments are capable of ppb to ppm sensitivity for multiple gas species including NF3, NH3, H2, NO and N2O and gases with as much as 30% water.
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