Rotary Vacuum Pump
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Many Quorum Technologies products require the addition of a suitable two-stage rotary vacuum, either a primary pump (e.g. for direct pumping of low vacuum sputter coaters, such as the SC7620 and Q150R) or to ‘back’ and rough-pump instruments with built-in turbomolecular pumps, such as the Q150T sputter coater and K975X vacuum evaporator.