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Work chamber
The borosilicate glass work chamber is 250 mm diameter x 300 mm high and mounted on an aluminium support collar. A tough chamber implosion guard is included as standard. The chamber can accommodate specimens up to 8"200 mm in diameter. A unique rack-out specimen loading system gives the user easy specimen access and the hinged lid assembly makes other areas of the vacuum chamber readily accessible.
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Vacuum-Side shutter kit
Vacuum-side shutter kit containing shutter blade, arm and shaft, and attachment parts (SPECIFY DESIRED BLADE, ARM AND SHAFT DIMENSIONS AT CHECKOUT)
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Vacuum Oscillator
In-vacuum oscillator (MicroDot connections, specify length) with coiled cooling tube on 1" bolt feedthrough, welded assembly, includes 2 in-vacuum cables
Brand Name : MMC
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vacuum deposition
As a modern reworking of the Edwards E306, the M307 is a highly affordable vacuum coating system for R&D-scale deposition of metals via thermal evaporation. Can also be configured for deposition of organics and dielectrics via low-temperature thermal evaporation and magnetron sputtering.
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reagents Safe handling
The GloQube has automatic valving between the twin chambers which maintains cleanliness by preventing cross-contamination. At the end of a glow discharge process run, automatic "soft" venting to atmosphere through filtered inlets ensures that delicate samples, such as carbon coated TEM grids, are not disturbed. The GloQube require a single vacuum pump working in the 0.1 to 1 mbar range. A typical pump time to operational vacuum is 60 seconds. A 750 mm flexible stainless vacuum hose is supplied with the GloQube.
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Turbomolecular pumping
The K975X uses a 100 Ls turbomolecular pump backed up by an external rotary vacuum pump (not included, see: 13034) with the complete pumping sequence being under fully-automatic control. The vacuum pump-down sequence is automatically controlled by the system microprocessor and vacuum measurement is by a combined piranipenning gauge and is displayed digitally. Process gases (nitrogen for venting - if fitted - and argon for the optional EK4175 sputtering attachment) are automatically controlled and can be programmed for use during coating sequences. The vent valve has an adjustable restrictor and programmable vent time to prevent disturbing specimens due to the inrush of gas at the end of the cycle. A very useful feature of the K975X is ‘vacuum shut-down’, which allows the process chamber to remain under vacuum when not in use. This helps to maintain a high level of system cleanliness and enhances vacuum performance.
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Turbomolecular pumping
The preparation chamber is pumped by a remotely-positioned 70 Ls turbomolecular pumping system. Typical preparation chamber vacuums when cold are in the region of 10-7mbar or better. Positioning the turbomolecular pump away from the SEM ensures total elimination of mechanical vibration and has the advantage of significantly reducing the total cryo system mass connected to the SEM. A vacuum buffer tank (remotely located in the PrepdekTM) is automatically pumped when required. The pumping system is connected to the preparation chamber by flexible stainless-steel bellows, which allows flexible positioning of the pumping system. the turbomolecular pump and for slushing and rough pumping operations. The rotary pump can be located up to five metres from the system, allowing remote location if required.
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Trajectory Solar Monitor
TSM is a state-of-the-art metrology product line for thin film PV manufacturing lines. Approved for in-situ integration by leading PV developers, TSM products push the metrology performance envelope for robustness, reliability, and cost implementing flexible fiber coupled sensor architecture. With optimized optics enabling high tilt and roughness tolerance and simple yet powerful spectral detectors, cost is minimized at a MTBF >10,000 hours. The TSM product line is offered in several configurations for a broad range of applications. UV-Vis reflectometry for buffer and TCO layers thickness and composition measurement. Near Infra-red reflectometry for CIGSCdTe thickness and composition measurement NIR-base photoluminescence for CIGSCdTe band gap analysis.
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Touch-screen control
At the operational heart of the Q300T ES is a colour touch screen which allows users to rapidly enter and store their own process data. A range of typical sputtering and evaporation profiles are pre-installed. The Q300T ES uses an 'Intelligent' recognition system that automatically detects the type of coating insert fitted and "becomes" either a evaporator, carbon coater or sputter coater. https:www.quorumtech.comquorum-productq300t-es-large-chamber-turbo-pumped-evaporatorsputter-coater
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Throttle Valve
Throttle valve for mounting on ISO-160 ports, constructed from aluminium blade and body, SS shaft, PTFE bushes and o-ring seals. Not designed for use as a shutoff valve. Ideal for use in cases where sputtering or any relatively high-pressure vacuum process is required, or in any situation where gas flow throttling is required to prevent pump stalling. Here the use of throttle valves is also advantageous through reductions to the quantities of process gases required. The basic valve is operated operated manually. Alternatively, we can fit them with electrical motors or pneumatic components for DC or pneumatic valve actuation, respectively (SELECT APPROPRIATE OPTION BELOW). With such automated actuation, the valve moves between fully open and a mechanically defined setpoint.
Brand Name : Moorfield
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Thermal evaporation source
Triple thermal evaporation source with water-cooled feedthroughs. Suitable for accepting industry-standard boat, basket or filament sources. Short or long power legs. Available in radial or linear geometries (radial version shown). Rated for 100 A maximum current.
Brand Name : Moorfield
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metals Thermal evaporation
The Q300T ES allows controlled thermal evaporation of metals onto large substrates (up to 6”152 mm). For many evaporative processes tungsten filaments supplied with the system are used. However, some metals require the use of a molybdenum boat, which can also be used for heat-cleaning SEM and TEM apertures. The evaporation head is normally positioned for downwards evaporation, but for small specimens upward evaporation is possible using two terminal extensions supplied with the system.
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Thermal evaporation controller
TEC-4CDA four-channel co-deposition thermal evaporation controller. Can be used for operation of up to two sources simultaneously. Compatible with most R&D thermal evaporation sources. Manual or automatic contol (automatic control is via a 0-10 V analogue input and source selection relays on the unit's back panel). Optionally available with complete transformer circuit and cable set for power delivery.
Brand Name : Moorfield
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thermal evaporation system
Thermal evaporation is a common, straightforward means of thin film deposition typically used to deposit metals. Materials are heated, under vacuum, to temperatures at which they evaporate or sublime.
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The Stinger Cooling System
Modular closed cycle cooling system that can be used for multiple experiments. “Build” a cryohead based on your unique needs.
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The freeze drying
Freeze drying specimen preparation reduces the distortion and shrinkage effects that occur when a wet specimen dries by normal evaporation. Distortion is due to the forces of surface tension that occur when going from a liquid to a vapour phase, such as from water to water vapour - the normal situation with biological specimens. The freeze drying method overcomes this problem by careful sublimation of frozen specimens under vacuum - a process that avoids the liquid phase and thereby reduces distortion effects. The rate of sublimation is a function of temperature and vacuum, with typical drying times being several hours or longer.
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Temperature Control
the temperature of water circulating through the jacket. Three pressure valves permit easy connection to the liquid CO2 cylinder and allow liquid agitation and venting of the chamber. A source of hot running water is essential. Cooling is also useful, especially for sequential critical point drying process runs andor in laboratories where the room temperature may be high. The temperature of the E3100 chamber is raised with a hot water supply. Mains water can be used but a more elegant method involves the use of the optional E4860 Recirculating HeaterChiller which can be used to pre-cool the chamber to below ambient temperature prior to loading specimens and then to heat the chamber to the critical temperature.
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TEM Prep Slusher
Offers an easy and convenient way of transporting pre-frozen specimens to and from the PP3010T Conveniently locates into the Prepdek workstation of the PP3010T Freely transportable, e.g. between high pressure freezer, cryoultramicrotome and the PP3010T Ideal for loadingunloading TEM grids and grid holders Tilting holder for cryo shuttles (holders). Allows the easy transfer of specimens from external freezers (e.g. high pressure, jet, slam etc) Option for PP3010T and previous PP3000T and PP2000PP2000T models.
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system components
Mounted onto a suitable vacuum chamber port, the CoolLok consists of a loading chamber body with built-in controls for pumping, venting and transfer. A custom-designed interface flange to the vacuum chamber and connections and fittings to the pumping system are included (see: Pumping below). The interface has cold nitrogen gas feeds to and from the microscope cold stage and cold trap. Interlocking to the microscope is included.
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Sputter coating
The advance design of sputtering head, power supply and system control allows sputtering of both oxidising and non-oxidising (noble) metals for thin film applications and for scanning electron microscopy (SEM) coating. The range of target materials available is extensive and detailed in the Ordering Information section. For sputtering applications where thick films are required, then the Q300T ES can operate for up to 60 minutes.
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sputter coaters
Disc-style (57 mm) sputtering targets for current q series of coaters and sc7620. Also for many old models, including k575, k575x, e5000, e5200, e5400, and previous models using the same style of puttering target. See: ordering information for more details.
Features : 57 mm diameter disc-style (no backing plate),Oxidising metals available for Quorum turbo-pumped coaters (including Q150T and Q300T.Etc
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Specimen stub
Specimen stubs with surface slots, holes and a flat area - useful for most specimen types. Blank and slotted stubs are also included. In addition a range of optional holders is available, including shuttles for large specimens and top-loading holders for high pressure freezing, TEM Autogridstm (for cryo-FIBSEM applications) and clamping shuttles for hard specimens.
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Specimen stages
The K975X is fitted with an 80 mm flat stage as standard, but this may be exchanged for optional holders, such as a 3 mm grid holder, low-angle shadowing attachment and a rotary planetary stage (see: Additional Information). Specimen holders have bayonet fixings to allow quick exchange. The rotary stage is mounted on a sliding access port on the side of the chamber. This allows the user to exchange specimens quickly without having to remove the glass chamber and disturb the coating set-up. For rotary shadowing techniques the standard stage can be tilted from 0° to +- 180°.
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Specimen holder
This permits specimens in the intermediate fluid to be transferred to the chamber of the critical point dryer. On sealing the chamber, the intermediate fluid begins to drain and can be replaced with liquid CO2. In this way the specimens are never allowed to dry out during the loading and transfer stage of the critical point drying process. The E3100 is supplied with the E3100-01 tissue boat which has three slots each with three tissue baskets, making a total of nine. Optional holders are available and are listed under Ordering Information.
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Turnkey Systems
Moorfield nanoPVD systems are high-performance, high-vacuum deposition systems in compact packages. Superior, space-efficient performance for a variety of thin-film deposition techniques.
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